Difference between revisions of "July 14, 2015 - Mott Group Meeting"
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* [[media:July14_presentation.pdf ]] | * [[media:July14_presentation.pdf ]] | ||
* [[media:July14_systematic.pdf ]] | * [[media:July14_systematic.pdf ]] | ||
| + | |||
| + | 3. Estimation of uncertainty in SEM target thickness measurements | ||
| + | * SEM device e.g. resolution | ||
| + | * SEM measurement e.g. foil preparation, multiple scans of same edge, imaging an edge | ||
| + | * SEM image analysis e.g. [http://www.lithoguru.com/scientist/litho_tutor/Tutor62%20(Aug%2008).pdf Line Edge Roughness] and methodology | ||
== Blue Jeans and Wiki == | == Blue Jeans and Wiki == | ||
Latest revision as of 13:26, 14 July 2015
We will meet on Tuesday, July 14th at 1:30pm in TL-1227.
Agenda
1. Mott Analysis Update
2. Sensitivity of A0 and alpha to systematic time and energy cuts and target thickness uncertainty
3. Estimation of uncertainty in SEM target thickness measurements
- SEM device e.g. resolution
- SEM measurement e.g. foil preparation, multiple scans of same edge, imaging an edge
- SEM image analysis e.g. Line Edge Roughness and methodology
Blue Jeans and Wiki
Toll Free Phone number: 1-888-240-2560 Int'l Call Phone numbers: http://bluejeans.com/numbers Meeting ID: 511163829# Web connection for desktop sharing: https://bluejeans.com/511163829 Wiki: https://wiki.jlab.org/ciswiki/index.php/July_14,_2015_-_Mott_Group_Meeting