Raster Size Calibration

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Back to Installation and Commissioning

Raster Size Tuning

  1. Move target to Carbon Single-Foil
  2. Request 5uA beam with 2x2 raster
  3. Run spotL/spotR
  4. Look at BPM plots, note actual rastered beam size
  5. Request 5uA beam with modified raster size, to try to get actual raster size to 2x2mm
  6. Iterate 2-5 until the actual raster size is 2x2mm
  7. Note requested "MCC Raster Size" on the whiteboard
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